| Skrót | Pełna nazwa
|
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Buffer oxidation
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| BUFOXTIME | Buffer oxidation time
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| BUFOXTEMP | Buffer oxidation temperature
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| BUFOXP02 | Buffer oxidation oxygen partial pressure
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| BUFOXPHCL | Buffer oxidation HCl partial pressure
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| Field implantation
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| FIMPENERG | Field implant energy
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| FIMPDOSE | Field implant dose
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| Field oxidation
|
| FOXTIME | Field oxidation time
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| FOXTEMP | Field oxidation temperature
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| FOXPO2 | Field oxidation oxygen partial pressure
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| First gate oxidation
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| GOX1TIME | First gate oxidation time
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| GOX1TEMP | First gate oxidation temperature
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| GOX1PO2 | First gate oxid. oxygen partial pressure
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| GOX1PHCL | First gate oxid. HCl partial pressure
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| Second gate oxidation
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| GOX2TIME | Second gate oxidation time
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| GOX2TEMP | Second gate oxidation temperature
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| GOX2PO2 | Second gate oxidation oxygen partial pressure
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| GOX2PHCL | Second gate oxidation HCl partial pressure
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| Enhancement channel implantation
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| ENHIMPDOSE | Enhancement channel implant dose
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| ENHIMPENER | Enhancement channel implant energy
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| Depletion channel implantation
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| DEPIMPDOSE | Depletion channel implant dose
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| DEPIMPENER | Depletion channel implant energy
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| Deposition of polysilicon
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| POLYTIME | PolySi deposition time
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| POLYTEMP | PolySi deposition temperature
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| Doping of polysilicon
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| POLYDOPTIM | PolySi doping time
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| POLYDOPTMP | PolySi doping temperature
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| Oxidation of polysilicon
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| POXTIME | PolySi oxidation time
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| POXTEMP | PolySi oxidation temperature
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| Source/drain predeposition
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| SDPREDTIME | Source/drain predeposition time
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| SDPREDTEMP | Source/drain predeposition temperature
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| SDPREDNS | Source/drain surface doping concentration
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| Source/drain first oxidation
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| SDOX1TIME | S/D first oxidation time
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| SDOX1TEMP | S/D first oxidation temperature
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| SDOX1PO2 | S/D first oxidation oxygen partial press.
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| Source/drain second oxidation
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| SDOX2TIME | S/D second oxidation time
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| SDOX2TEMP | S/D second oxidation temperature
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| SDOX2PO2 | S/D second oxidation oxygen partial pressure
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| Source/drain drive-in
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| SDDITIME | Source/drain drive-in time
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| SDDITEMP | Source/drain drive-in temperature
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| Densification
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| DENSTIME | Densification time
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| DENSTEMP | Densification temperature
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| Contact predeposition
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| CTPRETIME | Contact predeposition time
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| CTPRETEMP | Contact predeposition temperature
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| CTPRENS | Contact predeposition surface concentration
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| Contact drive-in
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| CTDITIME | Contact drive-in time
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| CTDITEMP | Contact drive-in temperature
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